Seminar PVD-/CVD Processes 

  1. Fundamentals, basic function of PVD / CVD processes
  2. Physical requirements
  3. PVD-processes (thermal evaporation, sputtering, reactive sputtering, electron beam evaporation, ...)
  4. CVD-processes (metal-CVD, non-metal-CVD, plasma enhanced CVD (PECVD), ...)
  5. Discussion of specific process problems

Target:

Basic understanding of PVD / CVD processes and the reactions during these processes. Better un- derstanding of the own application.

Target Group:

Participants with basic knowledge of vacuum technology. Mechanics, commissioning engineers, service personnel, shift supervisors / foremen, maintenance personnel, etc.

Recommended Duration:

1 day per process (CVD, PVD) 

 
 
 
  • Druschke Group Headquarter
  • Fon + 49 (0) 6051 916 678 0
  • Fax + 49 (0) 6051 916 678 17
  • E-Mail: info@druschke.eu

 

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